发明名称 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, AND ARRAY SUBSTRATE
摘要 A thin film transistor and manufacturing method thereof, and an array substrate. Mutually independent nano conductive points (7) are formed at a thin film transistor active layer channel region, such that the active layer (4) channel region is split into plural mutually independent sub-channels, thereby increasing equivalent electric field strength. A greater equivalent electric field strength results in a greater carrier mobility. Thus, the formed thin film transistor has a larger on-state current, facilitating the manufacture of a thin film transistor having a higher resolution and aperture ratio.
申请公布号 WO2017004840(A1) 申请公布日期 2017.01.12
申请号 WO2015CN83931 申请日期 2015.07.14
申请人 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 LU, Macai
分类号 H01L29/786 主分类号 H01L29/786
代理机构 代理人
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