SYSTEM AND METHOD FOR SCANNING AN OBJECT WITH AN ELECTRON BEAM

摘要

A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.

主权项

1. A charged particle beam system, comprising:
charged particle beam optics including a module that generates a charged particle beam, wherein the charged particle beam optics are configured to scan, by the charged particle beam, multiple partially overlapping areas of an object so that each point of the multiple areas is scanned multiple times and each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other; and a movable stage configured to introduce a movement along a first direction at a constant velocity between the object and the charged particle beam optics; wherein the scanning is executed by the charged particle beam optics and includes performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement.