发明名称 |
METHOD FOR PRODUCING DEPOSITION MASK, DEPOSITION MASK PREPARATION BODY, METHOD FOR PRODUCING ORGANIC SEMICONDUCTOR ELEMENT, METHOD FOR PRODUCING ORGANIC EL DISPLAY, AND DEPOSITION MASK |
摘要 |
This method for producing a deposition mask comprises steps of: preparing a deposition mask preparation body having a metal mask on one surface of a resin plate for a resin mask and a protective sheet on the other surface of the resin plate, the protective sheet having a peel strength as determined in accordance with JIS Z-0237:2009 of 0.0004 N/10 mm (inclusive) to 0.2 N/10 mm (exclusive); irradiating the resin plate of the deposition mask preparation body with laser light from the metal mask side to form resin mask openings corresponding to a pattern to be formed on the resin plate by deposition; and removing the protective sheet from the resin mask with the resin mask openings corresponding to the pattern to be formed by deposition. |
申请公布号 |
WO2017006821(A1) |
申请公布日期 |
2017.01.12 |
申请号 |
WO2016JP69250 |
申请日期 |
2016.06.29 |
申请人 |
DAI NIPPON PRINTING CO., LTD. |
发明人 |
TAKEDA Toshihiko;HOKARI Kumiko;SONE Yasuko;OBATA Katsunari |
分类号 |
C23C14/04;B23K26/382;C23C14/24;H01L51/50;H05B33/10 |
主分类号 |
C23C14/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|