发明名称 METHOD FOR PRODUCING DEPOSITION MASK, DEPOSITION MASK PREPARATION BODY, METHOD FOR PRODUCING ORGANIC SEMICONDUCTOR ELEMENT, METHOD FOR PRODUCING ORGANIC EL DISPLAY, AND DEPOSITION MASK
摘要 This method for producing a deposition mask comprises steps of: preparing a deposition mask preparation body having a metal mask on one surface of a resin plate for a resin mask and a protective sheet on the other surface of the resin plate, the protective sheet having a peel strength as determined in accordance with JIS Z-0237:2009 of 0.0004 N/10 mm (inclusive) to 0.2 N/10 mm (exclusive); irradiating the resin plate of the deposition mask preparation body with laser light from the metal mask side to form resin mask openings corresponding to a pattern to be formed on the resin plate by deposition; and removing the protective sheet from the resin mask with the resin mask openings corresponding to the pattern to be formed by deposition.
申请公布号 WO2017006821(A1) 申请公布日期 2017.01.12
申请号 WO2016JP69250 申请日期 2016.06.29
申请人 DAI NIPPON PRINTING CO., LTD. 发明人 TAKEDA Toshihiko;HOKARI Kumiko;SONE Yasuko;OBATA Katsunari
分类号 C23C14/04;B23K26/382;C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/04
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