| 摘要 |
An inertial force sensor is provided with an acceleration detection element (20), a temperature sensor (44) for detecting the temperature around the acceleration detection element (20), a bridge circuit (first bridge circuit (41)) for processing an output signal from the acceleration detection element (20), an AD converter (first ∆∑AD converter (47)) for converting an analog signal output by the bridge circuit to a digital signal and outputting the same, a calculation circuit (49) for subjecting the output signal output from the AD converter to calculation, and a storage means (50) for storing correction data for correcting the amount of fluctuation in the output signal from the AD converter resulting from temperature variation. The correction data consists of coefficients of a formula represented by a calibration curve that is at least a quadratic curve. The storage means (50) stores, as the correction data, coefficients for a plurality of calibration curve patterns that differ at or above a prescribed temperature and below the prescribed temperature. |
