| 摘要 |
The invention relates to a spiral spring (4) and to a method for producing the spiral spring (4). The spiral spring (4) has at least one winding (9), which consists of a solid core (16) composed of a silicon material (32). The core (16) comprises two long parallel and straight sides (22) and two short parallel and straight sides (24O, 24U). At least the opposite long sides (22) of the core (16) are covered by a SiO2 layer (20). In the method, the windings (9) are etched from the silicon material such that the core (16) of the at least one winding (9) of the spiral spring (4) is formed and comprises two long parallel and straight sides (22) and two short parallel and straight sides (24O, 24U). |
