发明名称 METHOD FOR MANUFACTURING MONOCRYSTALLINE GRAPHENE
摘要 The present invention provides a method for manufacturing a monocrystalline graphene layer, comprising the steps of: forming polycrystalline graphene on a substrate by using a hydrocarbon gas to grow a graphene layer aligned on a wafer-scale insulator substrate in one direction like a monocrystal; forming a catalyst on the polycrystalline graphene; and recrystallizing the polycrystalline graphene to monocrystalline graphene by heat-treating the polycrystalline graphene and the catalyst.
申请公布号 US2017009371(A1) 申请公布日期 2017.01.12
申请号 US201415103368 申请日期 2014.12.26
申请人 KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE 发明人 HWANG Chanyong
分类号 C30B1/08;C30B29/02;C23C16/26;C01B31/04 主分类号 C30B1/08
代理机构 代理人
主权项 1. A method of manufacturing monocrystalline graphene, the method comprising: forming polycrystalline graphene on a substrate using a hydrocarbon gas; forming a catalyst on the polycrystalline graphene; and recrystallizing the polycrystalline graphene into monocrystalline graphene by heat-treating the polycrystalline graphene and the catalyst.
地址 Daejeon KR