摘要 |
According to various embodiments, there is provided a motion measurement device including a first proof mass and a second proof mass, each of the first proof mass and the second proof mass configured to be at least partially rotatable in-plane; a pair of resonators arranged between the first proof mass and the second proof mass; wherein a first resonator of the pair of resonators is configured to resonate at a first frequency and a second resonator of the pair of resonators is configured to resonate at a second frequency; and a determination circuit configured to determine an acceleration based on the first frequency and the second frequency. |