发明名称 FOCUSING POINT DETECTION DEVICE
摘要 A focusing point detection device is disclosed. The focusing point detection device, according to one embodiment, comprises: a first beam splitter which is provided between a light source emitting a processing beam and a light-collecting optical system light-collecting the processing beam, and which reflects at least one portion of a reflected beam reflected from a subject to be processed; a first lens unit which focuses the reflected beam reflected from the first beam splitter; and a first optical sensor which is provided in the direction from the first lens unit where the reflected beam is focused, and which measures the energy density of the reflected beam focused by the first lens unit.
申请公布号 WO2017007256(A1) 申请公布日期 2017.01.12
申请号 WO2016KR07362 申请日期 2016.07.07
申请人 EO TECHNICS CO.,LTD. 发明人 SUNG, Jin Woo
分类号 B23K26/70;B23K26/06;B23K26/064;B23K26/067;G01M11/00 主分类号 B23K26/70
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