METHOD FOR PREPARING CROSS-SECTIONS BY ION BEAM MILLING

摘要

The disclosure provides a method for preparing a cross-section of a sample by milling with a focused ion beam. The cross-section is to be prepared at a pre-defined position. The method includes excavating a trench by milling in a first milling direction. The first milling direction leads away from the position of the cross-section to be prepared. The method also includes excavating the cross-section by enlarging the trench by milling in the reversed milling direction. The second milling direction leads towards the position of the cross-section to be prepared, whereupon the milling is completed at the position where the cross-section is to be cut. The desired largest milling depth is achieved at the completion of this milling step.

主权项

1. A method for preparing a cross-section at a position of a sample, the method comprising:
a) excavating a trench by milling in a first milling direction which leads away from the position of the sample; and b) excavating the cross-section of the sample by enlarging the trench by milling in a second milling direction which is the reverse direction of the first milling direction and which leads toward the position of the sample, whereupon milling is completed at the position of the sample, wherein a largest milling depth is achieved at the completion of b).