| 发明名称 |
METHOD AND APPARATUS FOR GENERATING A PREDETERMINED THREE-DIMENSIONAL CONTOUR OF AN OPTICAL COMPONENT AND/OR A WAFER |
| 摘要 |
A method for generating a predetermined three-dimensional contour of a component and/or a wafer comprises: (a) determining a deviation of an existing three-dimensional contour of the component and/or the wafer from the predetermined three-dimensional contour; (b) calculating at least one three-dimensional arrangement of laser pulses having one or more parameter sets defining the laser pulses for correcting the determined existing deviation of the three-dimensional contour from the predetermined three-dimensional contour; and (c) applying the calculated at least one three-dimensional arrangement of laser pulses on the component and/or the wafer for generating the predetermined three-dimensional contour. |
| 申请公布号 |
US2017010540(A1) |
申请公布日期 |
2017.01.12 |
| 申请号 |
US201615272936 |
申请日期 |
2016.09.22 |
| 申请人 |
Carl Zeiss SMS Ltd. ;Carl Zeiss SMT GmbH |
发明人 |
Dmitriev Vladimir;Geh Bernd |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for generating a predetermined three-dimensional contour of an optical component and/or a wafer, the method comprising:
a. determining a deviation of an existing three-dimensional contour of the optical component and/or the wafer from the predetermined three-dimensional contour; b. calculating at least one three-dimensional arrangement of laser pulses having one or more parameter sets defining the laser pulses for correcting the determined existing deviation of the three-dimensional contour from the predetermined three-dimensional contour; and c. applying the calculated at least one three-dimensional arrangement of laser pulses on the optical component and/or the wafer for generating the predetermined three-dimensional contour. |
| 地址 |
Karmiel IL |
