| 发明名称 |
MODEL FOR CALCULATING A STOCHASTIC VARIATION IN AN ARBITRARY PATTERN |
| 摘要 |
A method of determining a relationship between a stochastic variation of a characteristic of an aerial image or a resist image and one or more design variables, the method including: measuring values of the characteristic from a plurality of aerial images and/or resist images for each of a plurality of sets of values of the one or more design variables; determining a value of the stochastic variation, for each of the plurality of sets of values of the one or more design variables, from a distribution of the values of the characteristic for that set of values of the one or more design variables; and determining the relationship by fitting one or more parameters from the values of the stochastic variation and the plurality of sets of values of the one or more design variables. |
| 申请公布号 |
US2017010538(A1) |
申请公布日期 |
2017.01.12 |
| 申请号 |
US201515116486 |
申请日期 |
2015.02.04 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
HANSEN Steven George |
| 分类号 |
G03F7/20;G03F1/70;G06F17/50 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of determining a relationship between a stochastic variation of a characteristic of an aerial image or of a resist image, and one or more design variables, the method comprising:
measuring values of the characteristic from a plurality of aerial images and/or resist images for each set of a plurality of sets of values of the one or more design variables; determining a value of the stochastic variation, for each set of the plurality of sets of values of the one or more design variables, from a distribution of the values of the characteristic for that set of values of the one or more design variables; and determining, by a hardware computer, the relationship by fitting one or more parameters from the values of the stochastic variation and the plurality of sets of values of the one or more design variables. |
| 地址 |
AH Veldhoven NL |
