| 发明名称 |
COVER FOR COMPONENT OF POLISHING APPARATUS, COMPONENT OF POLISHING APPARATUS, AND POLISHING APPARATUS |
| 摘要 |
There is provided a cover to which a polishing liquid is less likely to stick and solidify. The cover for a component of a polishing apparatus for polishing substrates is provided with a locking mechanism disposed inside the cover and configured to latch together a main body of the component and the cover. An external surface of the cover exposed to the outside has no recessed portion, and has no horizontal plane, except on the top portion of the cover. |
| 申请公布号 |
US2017008144(A1) |
申请公布日期 |
2017.01.12 |
| 申请号 |
US201514787424 |
申请日期 |
2015.03.27 |
| 申请人 |
EBARA CORPORATION |
发明人 |
SHINKAI Kenji;SONE Tadakazu;AIZAWA Hideo;AONO Hiroshi |
| 分类号 |
B24B37/34;B24B53/017 |
主分类号 |
B24B37/34 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A cover for a component of a polishing apparatus for polishing substrates, the cover comprising a locking mechanism disposed inside the cover and configured to latch together a main body of the component and the cover,
wherein an external surface of the cover exposed to the outside has no recessed portion, and has no horizontal plane, except on a top portion of the cover. |
| 地址 |
Tokyo JP |
