| 摘要 |
A physical quantity sensor includes a base substrate and an element piece bonded to the base substrate. The element piece includes fixed portions fixed to the base substrate, a first fixed electrode finger supported on the fixed portion, a second fixed electrode finger supported on the fixed portion, a fixed portion that is positioned between the fixed portions and is fixed to the base substrate, a movable portion that is displaceable with respect to the fixed portion, an elastic portion that links the fixed portion and the movable portion, a first movable electrode finger that is supported on the movable portion and that is arranged facing the first fixed electrode finger, and a second movable electrode finger that is supported on the movable portion and is arranged facing the second fixed electrode finger. |
| 主权项 |
1. A physical quantity sensor, comprising:
a substrate; and an element piece arranged on the substrate, wherein the element piece includes
a first fixed portion fixed to the substrate,a second fixed portion fixed to the substrate,a first fixed electrode finger that is supported on the first fixed portion, and that is positioned on the opposite side to the second fixed portion with respect to the first fixed portion,a second fixed electrode finger that is supported on the second fixed portion, and is positioned on the opposite side to the first fixed portion with respect to the second fixed portion,a third fixed portion that is positioned between the first fixed portion and the second fixed portion, and is fixed to the substrate,a movable portion able to displace with respect to the third fixed portion,an elastic portion that links the movable portion to the third fixed portion to be displaceable, and at least a portion of which is positioned between the first fixed electrode finger and the second fixed electrode finger,a first movable electrode finger that is supported by the movable portion and is arranged facing the first fixed electrode finger, anda second movable electrode finger that is supported by the movable portion and that is arranged facing the second fixed electrode finger. |
