MANUFACTURING EQUIPMENT MANUFACTURING SILICON OXIDE COMPOUND AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to the field of chemical and industrial equipment, and in particular, to manufacturing equipment manufacturing silicon oxide compound and a manufacturing method thereof. The equipment comprises at least one tub member (1) comprising an opening (2) at at least one end thereof, a reaction portion (3), and a collection portion (4). The reaction portion (3) is configured to receive a raw material (5). The collection portion (4) is provided with a collector (6) located at an opening end of the tub member (1). The reaction portion (3) is arranged away from the opening end of the tub member (1), and in a heating furnace (7). The collection portion (4) and the opening (2) are both arranged outside the heating furnace (7). Gases are drawn out and removed from the tub member (1) via an interface (8). The opening (2) of the tub member (1) is opened or sealed via a tub cover (9). The manufacturing method adopts the manufacturing equipment to resolve problems of high power consumption and low efficiency owing to a conventional silicon oxide compound manufacturing equipment and manufacturing method unable to deliver continuous production.