OSCILLATION DEVICE AND PHYSICAL QUANTITY SENSOR

摘要

An oscillation device includes a vibrator made of a quartz substrate, a vibration substrate coupled to the vibrator and including a peripheral portion surrounding a periphery of the vibrator, a support substrate jointed to the vibration substrate at the peripheral portion of the vibration substrate, a cap layer disposed on an opposite side of the vibration substrate from the support substrate and jointed to the vibration substrate at the peripheral portion of the vibration substrate via a joint. At least one pad electrically connected to the vibration substrate is formed on the cap layer. At least one conductor pattern opposed to the pad is formed on a vibration substrate side surface of the cap layer and is electrically connected to the pad.

主权项

1. An oscillation device comprising:
a vibrator made of a quartz substrate and configured to vibrate based on voltage application; a vibration substrate coupled to the vibrator and including a peripheral portion surrounding a periphery of the vibrator; a support substrate jointed to the vibration substrate at the peripheral portion of the vibration substrate; a cap layer disposed on an opposite side of the vibration substrate from the support substrate, jointed to the vibration substrate at the peripheral portion of the vibration substrate via a joint, and provided with at least one pad electrically connected to the vibration substrate; and at least one conductor pattern opposed to the pad, formed on a vibration substrate side surface of the cap layer, and electrically connected to the pad.