发明名称 Integrated Structures and Methods of Forming Vertically-Stacked Memory Cells
摘要 Some embodiments include an integrated structure having a stack of alternating dielectric levels and conductive levels, vertically-stacked memory cells within the conductive levels, an insulative material over the stack and a select gate material over the insulative material. An opening extends through the select gate material, through the insulative material, and through the stack of alternating dielectric and conductive levels. A first region of the opening within the insulative material is wider along a cross-section than a second region of the opening within the select gate material, and is wider along the cross-section than a third region of the opening within the stack of alternating dielectric levels and conductive levels. Channel material is within the opening and adjacent the insulative material, the select gate material and the memory cells. Some embodiments include methods of forming vertically-stacked memory cells.
申请公布号 US2017012053(A1) 申请公布日期 2017.01.12
申请号 US201615248968 申请日期 2016.08.26
申请人 Micron Technology, Inc. 发明人 Sun Jie;Simsek-Ege Fatma Arzum
分类号 H01L27/115;H01L21/28;H01L21/02 主分类号 H01L27/115
代理机构 代理人
主权项
地址 Boise ID US