| 摘要 |
The present invention is provided with: an illumination unit 10 having a light emission surface 14D for emitting illumination light having a specific wavelength in the form of a coherent plane wave onto an object 1 to be detected; and an imaging element 50 which has a pixel row 51 comprising two-dimensionally arrayed pixels, and which images an interference pattern formed on the basis of the illumination light acting on the object 1 to be detected. 0.0000001 < Z2/S < 16 holds, where S is the area of the light emission surface 14D, and Z is the distance from the light emission surface 14D to the pixel row 51. |
