MULTI-PLATE CAPACITIVE TRANSDUCER

摘要

A capacitive transducer includes first and second fixed outer plates, each having fixed electrodes positioned on inner surfaces, and a center plate assembly positioned between the fixed outer plates. The center plate assembly includes a top center plate and bottom center plate. The top and bottom center plates each have an inner section, an outer frame positioned outward of a perimeter of the inner section, a set of springs connecting the outer frame to the inner section, and a center electrode positioned on an outer surface of the inner section. The set of springs has thickness less than each of the inner section and the outer frame. The center electrodes of the top and bottom center plates are connected to become electrically one electrode.

主权项

1. A capacitive transducer comprising:
a first fixed outer plate having a first fixed electrode positioned on an inner surface; a second fixed outer plate having a second fixed electrode positioned on an inner surface; and a center plate assembly positioned between the first and second fixed outer plates, the center plate assembly comprising:
a top center plate comprising:
a first inner section;a first outer frame positioned outward of a perimeter of the first inner section;a first set of springs connecting the first outer frame to the first inner section, wherein the first set of springs has thickness less than each of the first inner section and the first outer frame;a first center electrode positioned on an outer surface of the first inner section; anda bottom center plate comprising:
a second inner section;a second outer frame positioned outward of a perimeter of the inner section;a second set of springs connecting the outer frame to the second inner section, wherein the second set of springs has a thickness less than each of the second inner section and the second outer frame;a second center electrode positioned on an outer surface of the second inner section, wherein the second center electrode and the first center electrode are connected to form a single electrode, and wherein the bottom center plate is a mirror image of the top center plate.