Devices And Methods For Feedthrough Leakage Current Detection And Decontamination In Ionization Gauges

摘要

Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.

主权项

1. A device comprising:
an ionization gauge in which ions are generated by electron flow between a cathode and an anode; and an electrical circuit coupled to the ionization gauge and configured to test the ionization gauge under vacuum in situ for leakage current and to respond to the leakage current to improve pressure measurement accuracy.