| 摘要 |
This atomic force microscope (100) generates interaction between a sample (103) and a probe (101) provided to the free end of a cantilever (102) while carrying out raster scanning between the cantilever and the sample relative to each other along the XY plane and acquiring sample information. The atomic force microscope is provided with: a raster scanning information generation unit (114) that generates raster scanning information; a raster scanning control unit (108) that controls raster scanning on the basis of the raster scanning information; and an interaction control unit (111) that controls the magnitude of the interaction on the basis of the raster scanning information. The interaction control unit decreases the magnitude of interaction in a relative manner when the relative speeds of the cantilever and the sample along the XY plane of raster scanning decrease relative to each other. |
