| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder which eliminates the need for complicated assembly adhesion work and peeling and demolition work of a processed member, and which does not deteriorate and enables repeated use.SOLUTION: A substrate tray includes: a plate like cover part 31 which has a base part 35 including one or multiple recessed parts 36, in which one or multiple substrates are respectively housed, on an upper surface and one or multiple opening parts 39 corresponding to at least one of the recessed parts 36 and is formed so as to be placed on the base part 35. The substrate tray includes a positioning mechanism (pin holes 37 and positioning pins 38) which positions the cover part 31 and the base part 35 so that a periphery of each opening of the cover part 31 covers an upper surface of an outer peripheral part of each silicon substrate K housed in the recessed part 36 of the base part 35 when the cover part 31 is placed on the base part 35. |
