| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a seed crystal holder, a seed crystal holder, a crystal growth apparatus, and a crystal growth method that suppress peeling of a seed crystal from a holding member.SOLUTION: A manufacturing method of a seed crystal holder includes a preparation step for preparing a holding member 2 made of carbon and a seed crystal 3 made of silicon carbide having a top face 3A larger than a bottom face 2A of the holding member 2, a fixing step for fixing the top face 3A of the seed crystal 3 to the bottom face 2A of the holding member 2, an arrangement step for arranging silicon particles 16 at the part of the top face 3A of the seed crystal 3 protruding from the holding member 2 so that the particles 16 contact a side face 2B of the holding member 2, a heating step for heating the holding member 2 and the particles 16 to a temperature higher than the melting point of silicon, and a bonding step for bonding the seed crystal 3 to the holding member 2 using the melted particles 16.SELECTED DRAWING: Figure 2 |
