发明名称 電子デバイスの製造方法
摘要 Provided is an electronic device capable of suppressing a positional shift between a cap and a substrate, and a method for producing the same. This electronic device is equipped with: a substrate including a substrate body having a principal surface, and a metal film provided on the principal surface and forming a ring-shape surrounding a prescribed region when seen from a planar view in the normal direction relative to the principal surface; and a cap which has an opening shaped so as to substantially match the prescribed region, joins to the metal film around the peripheral edge of the opening, and forms a sealed space along with the principal surface and the metal film. Furthermore, the electronic device is characterized in that the metal film has a projection projecting in the normal direction formed thereon, and the projection is positioned to the inside or to the outside relative to the peripheral edge of the opening.
申请公布号 JP6057039(B2) 申请公布日期 2017.01.11
申请号 JP20160548748 申请日期 2015.05.13
申请人 株式会社村田製作所 发明人 池田 功
分类号 H01L23/02;H03H9/02 主分类号 H01L23/02
代理机构 代理人
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