| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate delivery mechanism capable of preventing a substrate from being deviated when delivering the substrate.SOLUTION: A stage 18 of a load lock module 14 includes three lift pins 18a which are disposed on the same circumference in a planar view. A fork 17b of a carrier arm 17a includes three pads 17c formed from elastic bodies protruding upwards and abutted to a rear face of a wafer W. A pitch circle diameter of each of the lift pins 18a is set in such a manner that, when the wafer W is carried upwards by the lift pins 18a, the wafer W is positively deformed to be protruded upwards and the rear face of the wafer W is tilted with respect to a horizontal direction and when the tilted rear face of the wafer W is abutted to the three pads 17c, a force (e.g., a shear force 22) acting on the pads 17c along a direction tilted with respect to the horizontal direction is generated. |
