发明名称 研磨用組成物
摘要 Provided is a polishing composition which can suppress scratches on the surface of a metal substrate as an object to be polished, while suppressing dishing of the metal substrate. Disclosed is a polishing composition including functional polishing particles and water, the functional polishing particles containing a surface-modifying group having, at one end, a functional group that suppresses dissolution of a metal substrate by adsorbing to the metal substrate, and metal oxide particles to which the surface-modifying group is immobilized.
申请公布号 JP6057706(B2) 申请公布日期 2017.01.11
申请号 JP20120288415 申请日期 2012.12.28
申请人 株式会社フジミインコーポレーテッド 发明人 大西 正悟
分类号 H01L21/304;B24B37/00;C09K3/14 主分类号 H01L21/304
代理机构 代理人
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