BORON-CONTAINING DOPANT COMPOSITIONS, SYSTEMS AND METHODS OF USE THEREOF FOR IMPROVING ION BEAM CURRENT AND PERFORMANCE DURING BORON ION IMPLANTATION,申请号EP20150709078-传众专利搜索

发明名称	BORON-CONTAINING DOPANT COMPOSITIONS, SYSTEMS AND METHODS OF USE THEREOF FOR IMPROVING ION BEAM CURRENT AND PERFORMANCE DURING BORON ION IMPLANTATION
摘要
申请公布号	EP3114699(A1)	申请公布日期	2017.01.11
申请号	EP20150709078	申请日期	2015.03.03
申请人	Praxair Technology Inc.	发明人	SINHA, Ashwini, K.;SMITH, Stanley, M.;HEIDERMAN, Douglas, C.;CAMPEAU, Serge, M.
分类号	H01J37/317	主分类号	H01J37/317
代理机构		代理人
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