发明名称 切削装置
摘要 PROBLEM TO BE SOLVED: To provide a cutting device in which replacement frequency of a chuck table can be reduced further than the prior arts.SOLUTION: The cutting device includes: holding means including a holding surface for holding a workpiece; and cutting means including a spindle housing, a spindle which is housed within the spindle housing in a rotatable manner and a cutting blade mounted in a distal end portion of the spindle for cutting the workpiece held by the holding means. The cutting device also includes: a position detection unit including position detection means and moving means for moving the position detection means in a perpendicular direction so as to detect a height position of a distal end of the cutting blade and a height position of the holding surface of the holding means; and positioning means for positioning a lowest end of the cutting blade in a predetermined height location on the basis of the height position of the distal end of the cutting blade and the height position of the holding surface detected by the position detection unit.
申请公布号 JP6057853(B2) 申请公布日期 2017.01.11
申请号 JP20130150080 申请日期 2013.07.19
申请人 株式会社ディスコ 发明人 赤瀬 勝彦
分类号 H01L21/301;B24B27/06 主分类号 H01L21/301
代理机构 代理人
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