发明名称 Flow sensor for monitoring a flow parameter and method of determining the same
摘要 A flow sensor for determining a flow parameter of a fluid is shown in embodiment examples of the present invention, comprising a sensor chip, which has at least one thermal membrane sensor element, which is designed to determine the flow parameter of the fluid in a measurement region or to determine a fluid temperature of the fluid, wherein the thermal membrane sensor element has two thermocouple junctions arranged at a distance from each other and a heating element arranged between the thermocouple junctions, and wherein the sensor chip is designed for the fluid to flow around the sensor chip as a freestanding sensor finger during the operation of the flow sensor.
申请公布号 EP2869041(B1) 申请公布日期 2017.01.11
申请号 EP20140190554 申请日期 2012.08.28
申请人 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. 发明人 Hedrich, Frank;Billat, Sophie;Storz, Matthias;Kattinger, Gerhard;Ashauer, Matthias
分类号 G01F1/684;G01F1/688;G01N25/56 主分类号 G01F1/684
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