| 摘要 |
PROBLEM TO BE SOLVED: To maximize the ozone generation efficiency even when a discharge tube and a metal electrode of an electrode unit involved are decentered.SOLUTION: A plurality of electrode units of an ozone generator have a cylindrical high-voltage electrode and a cylindrical low-voltage electrode arranged so that the low-voltage electrode, together with the high-voltage electrode, forms a double tube. A raw material gas is caused to flow into a gap between the high- and the low-voltage electrode, and a predetermined high voltage is applied through a dielectric body to cause a discharge so as to produce ozone. A flow rate adjustment member arranged in at least a part of electric units functions so that the flow rate ratio of the flow rate of the raw material gas to a reference flow rate of the raw material gas gets 1. |
