| 发明名称 |
CONDENSER MICROPHONE WITH NON-CIRCULAR MEMBRANE |
| 摘要 |
A non-uniform stress distribution of a MEMS microphone having a non-circular shape is compensated by a structured back plate that has a compensating structure to provide a stress distribution opposite to that of the membrane. |
| 申请公布号 |
EP3114857(A1) |
申请公布日期 |
2017.01.11 |
| 申请号 |
EP20140708003 |
申请日期 |
2014.03.03 |
| 申请人 |
Epcos AG |
发明人 |
RAVNKILDE, Jan Tue;MORTENSEN, Dennis;GINNERUP, Morten |
| 分类号 |
H04R19/00;B06B1/02;B81B3/00;H04R7/16;H04R19/04 |
主分类号 |
H04R19/00 |
| 代理机构 |
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代理人 |
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