发明名称 ローラー
摘要 The invention provides rollers which apply a pressing force uniformly on an object. The rollers comprise a pressing roller (2), a flexible prevention roller (4) having an axial center (A2) in parallel with an axial center (A1) of the pressing roller (2) and having a diameter larger than that of the pressing roller (2), and a connection part (6). The flexible prevention roller (4) is configured to be adjacent to the pressing roller (2) and can press the pressing roller (2) in a state that the periphery (5) of the flexible prevention roller (4) is abutted against the periphery (3) of the pressing roller (2). The connection part (6) connects the pressing roller and the flexible prevention roller. Thus, compared with one roller, the rollers are improved in rigidity and prevent slight flexure of the pressing roller. The pressing roller can apply a pressing force on a bonding belt, so that a bonding belt (9) can be adhered to a plate-shaped object (W) when bubbles are formed between the bonding belt (9) and a plate-shaped object (W).
申请公布号 JP6058407(B2) 申请公布日期 2017.01.11
申请号 JP20130010025 申请日期 2013.01.23
申请人 株式会社ディスコ 发明人 高澤 徹
分类号 B65C9/30;H01L21/301;H01L21/304;H01L21/683 主分类号 B65C9/30
代理机构 代理人
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