Method for manufacturing solid-state imaging element, solid-state imaging element, method for manufacturing electronic apparatus, and electronic apparatus

摘要

Disclosed herein is a method for manufacturing a solid-state imaging element, the method including forming lenses that are each provided corresponding to a light receiving part of a respective one of a plurality of pixels arranged in an imaging area over a semiconductor substrate and collect light onto the light receiving parts; forming a light blocking layer by performing film deposition on the lenses by using a material having light blocking capability; and forming a light blocker composed of the material having light blocking capability at a boundary part between the lenses adjacent to each other by etching the light blocking layer in such a manner that the material having light blocking capability is left at the boundary part between the lenses.

主权项

1. A solid-state imaging element comprising:
a plurality of pixels arranged in an imaging area over a semiconductor substrate, each of the plurality of pixels including a light receiving part configured to accumulate a signal charge through photoelectric conversion of incident light; color filters, each provided for a respective one of the plurality of pixels; a first set of rounded lenses, each provided over a light receiving part of the respective one of the plurality of pixels and each being configured to collect light onto the light receiving part; a second set of rounded lenses, each provided over one of the first set of rounded lenses, and each being configured to collect light onto the one of the first set of rounded lenses; and a light blocker provided at a boundary between adjacent lenses of the first set of rounded lenses and a light blocker provided at a boundary between adjacent lenses of the second set of rounded lenses, wherein the light blocker provided at the boundary between adjacent lenses of the first set of rounded lenses is larger than the light blocker provided at the boundary between adjacent lenses of the second set of rounded lenses.