Methods for producing a thin film ferroelectric device using a two-step temperature process on an organic polymeric ferroelectric precursor material stacked between two conductive materials

摘要

Methods for producing ferroelectric device are described. A method includes positioning an organic polymeric ferroelectric layer between two conductive materials to form a stack. The stack can be subjected to a 2-step heat treating process. The first heat treating step transforms the organic polymeric ferroelectric precursor to a ferroelectric material having ferroelectric hysteresis properties, and the second heat treating step densities the ferroelectric material to obtain the ferroelectric device. The thin film ferroelectric device can include a thin film ferroelectric capacitor, a thin film ferroelectric transistor, or a thin film ferroelectric diode.

主权项

1. A method for producing a thin film ferroelectric device, the method comprising:
(a) depositing an organic polymeric ferroelectric precursor material onto a first conductive material such that the organic polymeric ferroelectric precursor material has a first surface and an opposing second surface, wherein the first surface of the organic polymeric ferroelectric precursor material is in contact with the first conductive material; (b) depositing a second conductive material on the second surface of the organic polymeric ferroelectric precursor material to form a stack, wherein the organic polymeric ferroelectric precursor material is positioned at least partially between the first and second conductive materials; (c) subjecting the stack to a first temperature above a melting temperature of the organic polymeric ferroelectric precursor material to form an organic polymeric ferroelectric material having ferroelectric hysteresis properties; and (d) subjecting the stack to a second temperature below the melting temperature of the organic polymeric ferroelectric precursor material to densify the organic polymeric ferroelectric material and to obtain a thin film ferroelectric device.