Manufacturing method of semiconductor device

摘要

A manufacturing method of a semiconductor device includes: depositing a thin film semiconductor layer on a semiconductor substrate with an insulating film therebetween, the insulating film having been formed on a surface of the semiconductor substrate; ion-implanting first impurity ions into the thin film semiconductor layer under a condition where a range of the first impurity ions becomes smaller than a film thickness of the thin film semiconductor layer when being deposited; and selectively ion-implanting second impurity ions into the thin film semiconductor layer with a dose quantity more than a dose quantity of the first impurity ions, in which a diode for detecting temperature is formed by a region into which the first impurity ions have been implanted and a region into which the second impurity ions have been implanted in the thin film semiconductor layer.

主权项

1. A manufacturing method of a semiconductor device comprising:
depositing a thin film semiconductor layer on a semiconductor substrate with an insulating film therebetween, the insulating film having been formed on a surface of the semiconductor substrate, and the thin film semiconductor layer being deposited to a film thickness; ion-implanting first impurity ions into the thin film semiconductor layer such that the first impurity ions reach only a partial thickness, less than an entirety of the film thickness, of the thin film semiconductor layer; selectively ion-implanting second impurity ions into the thin film semiconductor layer with a dose quantity per unit area more than a dose quantity per unit area of the first impurity ions; forming a diode for detecting temperature is formed by performing thermal treatment to activate the first and second impurity ions ion-implanted into the thin film semiconductor layer to thereby respectively form a first main electrode region having a first conductivity type and a second main electrode region having a second conductivity type in the thin film semiconductor layer, the first main electrode region and the second main electrode region being thinner than the film thickness.