Replaceable electrostatic chuck sidewall shield

摘要

A replaceable electrostatic chuck sidewall shield is provided. The replaceable electrostatic chuck sidewall shield fills or partially fills an indentation located between a base member and a top member of an electrostatic chuck, such that the replaceable electrostatic chuck sidewall shield may protect an epoxy in the indentation or may replace the epoxy within the indentation. The replaceable electrostatic chuck sidewall shield may be fully contained with the indentation. The replaceable electrostatic chuck sidewall shield may also cover an epoxy in the indentation such that the replaceable electrostatic chuck sidewall shield protrudes beyond the indentation. In an alternate embodiment, the replaceable electrostatic chuck sidewall shield substantially covers the area in which a conductive pole is embedded in a bipolar electrostatic chuck.

主权项

1. An electrostatic chuck comprising:
a base member having a first top surface; a top member on the base member; an indentation located at an interface of the base member and the top member; an adhesive material interposed between the top member and the base member, wherein the adhesive material joins the top member to the base member; an epoxy in the indentation, the epoxy contacting the base member and the top member, the epoxy comprising a material different from the adhesive material, the epoxy covering the adhesive material such that the adhesive material is not exposed; and a replaceable sidewall shield encircling a periphery of the indentation, the replaceable sidewall shield covering the epoxy; wherein a thickness of the adhesive material is less than a thickness of the epoxy in a direction perpendicular to the first top surface, and wherein the thickness of the epoxy is less than a thickness of the replaceable sidewall shield in the direction perpendicular to the first top surface.