Load port module

摘要

A load port module includes a plate to support at least one substrate, a sensor to detect foreign matter at a predetermined location, and a cleaner to remove the foreign matter at the predetermined location when the foreign matter is detected by the sensor. The cleaner removes the foreign matter at the predetermined location in synchronism with movement of the plate. A mover to move the plate continues to operate after detection of the foreign matter by the sensor and removal of the foreign matter by the cleaner.

主权项

1. A load port module, comprising:
a vertical frame having an opening to be closed by an opener for opening a door of a substrate cassette including a plurality of stacked substrates; a stage having a fixed plate that extends outwardly from the vertical frame, and a moving plate movably arranged on the fixed plate to support the substrate cassette; a driver under the stage and having a mover to drive the moving plate and opener; a safety sensor on at least one of the vertical frame or the stage around the opening, the safety sensor to generate a stop signal to stop the mover when foreign matter is detected around the opening; and a sensor cleaner connected to the driver to automatically remove the foreign matter when the moving plate moves, the mover continuing to operate after detection of the foreign matter by the safety sensor and removal of the foreign matter by the sensor cleaner.