Method and apparatus for generating X-ray radiation

摘要

The present invention relates in particular to methods and apparatuses for generating and/or providing X-ray radiation with specific radiation characteristics, in particular with a specific radiation dose rate curve (10). In order to provide simple and cost efficient solution, it is provided according to the invention, that the X-ray radiation is generated and/or provided, by composing and/or adapting the X-ray radiation with the specific radiation characteristics, in particular with the specific radiation dose rate curve (10), proportionally from a first specification X-ray radiation with a defined first radiation characteristics, in particular with a predetermined first radiation dose rate curve (11) and a second specification X-ray radiation, which is different from the first specification X-ray radiation, with defined second radiation characteristics, in particular with a predetermined second radiation dose rate curve (12).

主权项

1. Method for generating a specific radiation dose rate curve for an X-ray radiation for irradiation of a substrate, wherein the specific radiation dose rate curve represents a radiation dose rate as a function of distance, characterized in that the specific radiation dose rate curve is generated by selecting at least two predetermined radiation dose rate curves which are different from the specific radiation dose rate curve which is to be generated, and each of which represents a radiation dose rate as a function of distance, and by composing the specific radiation dose rate curve proportionally from the at least two predetermined radiation dose rate curves.