Method for forming thin film pattern

摘要

A method for forming a thin film pattern includes: forming a first resist pattern on a substrate; forming a second resist pattern on the substrate and the first resist pattern, forming a first metal layer overlapping an exposed portion of the substrate and exposed portions of the first and second resist patterns; removing the second resist pattern and a portion of the first metal layer, through a first lift-off process to expose portions of the substrate and the first resist pattern; forming a second metal layer overlapping portions of each of the substrate, the first resist pattern and the first metal layer; and removing the first resist pattern and the first and second metal layers, through a second lift-off process, to form first and second metal patterns from remaining portions of the first and second metal layers. The first and second resist patterns have different dissolution characteristics.

主权项

1. A method for forming a thin film pattern, comprising:
forming a first resist pattern on a substrate; forming a second resist pattern on the substrate and overlapping the first resist pattern on the substrate, the first and second resist patterns exposing a portion of the substrate; forming a first metal layer overlapping the portion of the substrate exposed by the first and second resist patterns, overlapping the first resist pattern and overlapping the second resist pattern, to dispose the first and second resist patterns between the first metal layer and the substrate; removing the first metal layer overlapping the second resist pattern and the second resist pattern disposed between the first metal layer and the substrate, through a first lift-off process to expose a portion of the substrate overlapped by the second resist pattern and to expose a portion of the first resist pattern overlapped by the second resist pattern; forming a second metal layer overlapping portions of each of the substrate, the first resist pattern and the first metal layer which are exposed by the removed second resist pattern; and removing the first resist pattern and removing the first metal layer and the second metal layer overlapping the first resist pattern, through a second lift-off process, to form the thin film pattern comprising: a first metal pattern and a second metal pattern from portions of the first metal layer and the second metal layer remaining after the removing the first and second resist patterns, wherein the first resist pattern and the second resist pattern have different dissolution characteristics from each other.