Pod and purge system using the same

摘要

An object is to prevent the partial pressure of oxidative gas over time in an FOUP mounted on an FIMS system and left open. A surface purge unit is provided on a side opposite to the opening of the FOUP in such a way that wafers supported in the FOUP is located between the opening and the surface purge unit. The surface purge unit ejects inert gas from a plurality of vent holes provided in its surface toward the opening. Uniform purging or replacement of the interior of the FOUP with inert gas can be achieved by creating inert gas flow from an inert gas supply part extending over a surface in the direction from the interior of the FOUP toward the opening along the wafer surface.

主权项

1. A pod comprising:
shelves provided in an interior space of the pod, on which shelves narrow plate-like contents spaced along a height direction may be placed respectively; an opening of the pod through which the contents may be transferred onto/from said shelves from/to outside; a lid configured to close said opening to seal said interior space; a surface purge unit having a surface provided as at least one of the inner surfaces of the pod, the one of the inner surfaces including a surface opposed to said opening and two side surfaces extending between said surface opposed to said opening and said opening, the surface purge unit having a plurality of vent holes and being arranged to eject a specific gas toward said contents in a direction parallel to surfaces of said contents; and at least two gas supply towers which connect to the surface of the surface purge unit provided as at least one of the inner surfaces of the pod, wherein the specific gas is supplied to the surface of the purge unit through the at least two gas supply towers.