发明名称 Transistor having a heterojunction and manufacturing method thereof
摘要 A transistor includes a semiconductor substrate comprising a first region and a second region. The transistor further includes an emitter and a base disposed on the first region, and a collector disposed on the second region. The emitter includes a heterojunction. The heterojunction is at a same height as a junction between two different insulating materials that separate the emitter and the base.
申请公布号 US9543390(B2) 申请公布日期 2017.01.10
申请号 US201414513792 申请日期 2014.10.14
申请人 Semiconductor Manufacturing International (Shanghai) Corporation 发明人 Fumitake Mieno
分类号 H01L29/66;H01L29/16;H01L29/08;H01L29/267;H01L29/735;H01L29/10;H01L29/165 主分类号 H01L29/66
代理机构 Innovation Counsel LLP 代理人 Innovation Counsel LLP
主权项 1. A transistor comprising: a semiconductor substrate comprising a first region and a second region; an emitter and a base disposed on the first region; and a collector disposed on the second region, wherein the emitter is disposed on an upper surface of the semiconductor substrate forming a heterojunction between the emitter and the upper surface of the semiconductor substrate, wherein the emitter and the base are spaced apart by a stacked layer including at least two different insulating materials, and wherein a junction between the at least two different insulating materials of the stacked layer has a substantially same height as a height of the heterojunction between the emitter and the upper surface of the semiconductor substrate.
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