Growth of carbon nanotube (CNT) leads on circuits in substrate-free continuous chemical vapor deposition (CVD) process

摘要

A method and structure for an electrical device and a plurality of electrical circuits including a plurality of carbon nanotubes (CNTs). The method can include forming a first CNT catalyst layer including a plurality of first CNT catalyst plugs, a plurality of electrical circuits electrically coupled to the first CNT catalyst layer, and a second CNT catalyst layer including a plurality of second CNT catalyst plugs electrically coupled to the second CNT catalyst layer. CNTs may be simultaneously formed on the plurality of first and second CNT catalyst plugs within a chemical vapor deposition (CVD) furnace.

主权项

1. A method for forming a plurality of electrical circuits, comprising:
forming a first carbon nanotube (CNT) catalyst layer comprising a plurality of first CNT catalyst plugs over a release layer; forming a plurality of electrical circuits over the first CNT catalyst layer, wherein each electrical circuit is in electrical communication with the first CNT catalyst layer; forming a second CNT catalyst layer comprising a plurality of second CNT catalyst plugs over the plurality of electrical circuits, wherein each electrical circuit is in electrical communication with the second CNT catalyst layer; removing the release layer to expose the plurality of first CNT catalyst plugs; and simultaneously forming a plurality of CNTs on the plurality of first CNT catalyst plugs and on the second plurality of CNT catalyst plugs within a chamber of a reactor.