Substrate processing apparatus and substrate processing method

摘要

A substrate is transported based on coordinates information indicating a receiving position of the substrate and a placement position of the substrate by a hand. If the substrate is shifted from a first position, the substrate is received by the hand while a center of the substrate is shifted from a normal position of the hand. The hand that holds the substrate is moved toward a second position. A plurality of portions at an outer periphery of the substrate are detected before the substrate is placed. A shift of the substrate with respect to the normal position of the hand is detected based on the detection result, and the coordinates information is corrected such that a shift between a position of the center of the substrate to be placed at the second position by the hand and the center of the second position is canceled.

主权项

1. A substrate processing apparatus that performs processing on a substrate, comprising:
a processing unit that has a supporter supporting the substrate and is configured to perform the processing on the substrate held by the supporter; a transport device that has a first holder configured to hold the substrate and to be capable of linearly advancing and retreating, and is configured to transport the substrate by moving the first holder; a storage that stores first control information for controlling the transport device such that the first holder of the transport device places the substrate at a predetermined position on the supporter of the processing unit; a controller that controls the transport device based on the first control information stored by the storage; and a plurality of not less than three detectors provided to detect a plurality of not less than three portions at an outer periphery of the substrate being moved by the first holder before the first holder places the substrate on the supporter, so as to detect a shift between a position of the substrate on the supporter and the predetermined position, wherein the plurality of detectors are arranged along a circular arc that corresponds to the outer periphery of the substrate on a first path on which the first holder advances and retreats, and configured to emit light to the first path and receive reflection light or transmitting light from the first path as returning light to generate output signals indicating presence/absence of receipt of the returning light as detection results, and the controller is configured to detect time points at which the plurality of portions at the outer periphery of the substrate are detected by the plurality of detectors based on the output signals of the plurality of detectors when the first holder advances or retreats on the first path, to correct the first control information based on the detected respective time points before the first holder places the substrate on the supporter, in order to correct such shift between the position of the substrate on the supporter and the predetermined position, and to control the transport device based on the corrected first control information, to reposition the substrate at the predetermined position on the supporter.