发明名称 Aromatic resins for underlayers
摘要 Polymeric reaction products of certain aromatic alcohols with certain aromatic aldehydes are useful as underlayers in semiconductor manufacturing processes.
申请公布号 US9540476(B2) 申请公布日期 2017.01.10
申请号 US201414569610 申请日期 2014.12.12
申请人 Rohm and Haas Electronic Materials LLC;Rohm and Haas Electronic Materials Korea Ltd. 发明人 Cui Li;Cho Sung Wook;Li Mingqi;Yamada Shintaro;Trefonas, III Peter;Auger Robert L.
分类号 G03F7/09;C08G8/08;C09D161/06;C08G8/04 主分类号 G03F7/09
代理机构 代理人 Cairns S. Matthew
主权项 1. A reaction product formed from a combination comprising one or more first monomers of the formulawherein Y is selected from H, C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —C1-C30alkylene-OR1, and —C1-C30alkylidene-OR1; each R is independently selected from C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —OR1, —C1-C30alkylene-OR1, and —C1-C30alkylidene-OR1; R1 is selected from H, C1-C30alkyl, C6-C30aryl, substituted C6-C30aryl, and C7-C30aralkyl; and n is an integer selected from 0 to 7; and one or more second monomers of the formula Ar—CHO, where Ar is a C10-C30aromatic moiety having at least 2 fused aromatic rings, which may optionally be substituted with one or more of C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —OR3, —C1-C30alkylene-OR3 and —C1-C30alkylidene-OR3; R3 is selected from H, C1-C30alkyl, and C6-C30aryl.
地址 Marlborough MA US