Inspecting device and inspecting method

摘要

An inspecting device includes: an irradiation part for dividing pulsed light emitted from a femtosecond laser into measurement pump light and measurement probe light, to irradiate a solar cell; a detection part for detecting an electromagnetic wave emitted from the solar cell in accordance with the irradiation with the measurement probe light; and a measurement delay part for delaying the time of arrival of the measurement probe light at the solar cell relatively to the measurement pump light. The irradiation part is provided with a galvano mirror for scanning with the measurement probe light a wide range which is wider than an irradiated range (pump light spot) being irradiated with the measurement pump light in a solar cell.

主权项

1. An inspecting device comprising:
an irradiation part for irradiating an inspecting target with each of pump light and probe light having the same pulse period; a detection part for detecting an electromagnetic wave generated from said inspecting target by irradiating said inspecting target with said probe light; a measurement delay part for delaying the time of arrival of said probe light at said inspecting target relatively to said pump light; and a reverse bias voltage applying part for applying a reverse bias voltage to said inspecting target, wherein said irradiation part includes a scanning mechanism to scan with said probe light a scanned and observed area which is larger than an irradiated area being irradiated with said pump light in said inspecting target, an area which is not irradiated with said pump light being also observed in addition to the irradiated area, and a diameter of a spot of said probe light is smaller than a diameter of a spot of said pump light, and the reverse bias voltage applied by said reverse bias voltage applying part is variable.