Industrial robot with elevating mechanism and arm-elevating mechanism

摘要

An industrial robot includes a robot main body and an elevating mechanism to raise and lower the robot main body. The robot main body may include a hand, an arm to which the hand is joined, a main body portion to which the arm is joined, and an arm-elevating mechanism. The center of rotation on the base end side of the arm may be located farther toward the third direction side than the center of the main body unit when viewed in the up-down direction. In the standby state, part of the arm may be positioned farther toward the fourth direction side than the main body unit. The main body unit may be secured to the elevating mechanism. The elevating mechanism may be arranged on one or both sides of the main body unit in the first direction and/or on the fourth direction side.

主权项

1. An industrial robot which transfers semiconductor wafers between multiple Front Open Unifier Pods (FOUPs) arranged in a fixed direction and a semiconductor wafer processing apparatus and which configures part of an EFEM, comprising:
a robot main body; and an elevating mechanism arranged outside said robot main body and structured to raise and lower said robot main body; wherein said robot main body comprises a hand on which said semiconductor wafers are to be mounted, an arm comprising by multiple arm portions rotatably joined with one another and to which said hand is rotatably joined to the front end thereof, a main body unit to which the base end of said arm is rotatably joined, and an arm-elevating mechanism structured to raise and lower said arm; wherein the first direction is the direction of arrangement of said multiple FOUPs, the second direction is the direction which orthogonally intersects with the up-down direction and said first direction, the third direction is one side of said second direction and the fourth direction is the other side of said second direction, the center of rotation on the base end side of said arm relative to said main body unit is located farther toward said third direction side than the center of said main body unit when viewed in the up-down direction, in the standby state of said industrial robot where said arm is retracted and said arm portion and said hands are overlapped with each other in the up-down direction, part of said arm is positioned farther toward said fourth direction side than said main body unit, said main body unit is secured to said elevating mechanism, and said elevating mechanism is arranged on one or both sides of said main body unit in said first direction and/or on said fourth direction side of said main body unit.