Multi-layered film, electronic device, and manufacturing methods thereof

摘要

A multi-layered film includes: a plate-like flexible base member; first inorganic members that are each plate-like and arranged on the base member in separation from each other in a direction parallel to a main surface of the base member; a first organic member provided on the base member so as to be positioned between each adjacent two first inorganic members and surround each first inorganic member; a second inorganic member that covers an upper surface and lateral surfaces of the first organic member; and a second organic member that is provided on or above the first inorganic members, and is surrounded by the second inorganic member. Each lateral surface portion of the second inorganic member covering a corresponding lateral surface of the first organic member is thinner than each first inorganic member and each upper surface portion of the second inorganic member covering a corresponding portion of the upper surface.

主权项

1. A multi-layered film comprising:
a base member that is plate-like and flexible; a plurality of first inorganic members that are each plate-like, and are arranged on the base member so as to be spaced from each other in a direction parallel to a main surface of the base member; a first organic member that is provided on the base member so as to be positioned between each adjacent two of the first inorganic members and surround each of the first inorganic members; a second inorganic member that covers an upper surface and lateral surfaces of the first organic member; and a second organic member that fills a space that is provided on or above the first inorganic members, and is surrounded, in a plan view, by the second inorganic member, wherein each of lateral portions of the second inorganic member that covers a corresponding one of the lateral surfaces of the first organic member is thinner than each of the first inorganic members and each of upper portions of the second inorganic member that covers a corresponding portion of the upper surface of the first organic member.