主权项 |
1. A microelectromechanical systems (MEMS) device comprising:
a structural layer having a surface, said surface including a first surface region and a second surface region adjacent to said first surface region, said first surface region lying in a first plane that is offset from a second plane of said second surface region, said second plane being substantially parallel to said first plane, and said surface including a longitudinal joint between said first and second surface regions; and at least one trench formed in said surface of said structural layer extending across said longitudinal joint. |