TRANSFER DEVICE AND CONTROL METHOD THEREOF

摘要

A transfer device can have a high durability and no limit in an operation of an arm member. An electrostatic pick 44 of a first transfer device 17 is advanced into a process module 12, and a wafer W is electrostatically attracted to and held on the electrostatic pick 44. While the wafer W is being transferred into a load lock module 14 by driving the first transfer device 17, the electrostatic pick 44 is turned into an electrically floating state, so that a state in which the wafer W is electrostatically attracted to and held on the electrostatic pick 44 is maintained. After the transferring of the wafer W to the load lock module 14 is completed, charges of the electrostatic pick 44 are neutralized, so that the wafer W is not electrostatically attracted to and held on the electrostatic pick 44.

主权项

1. A transfer device, comprising:
a transfer arm configured to transfer a transfer target object; a driving device configured to drive the transfer arm; a pick provided at a leading end of the transfer arm and configured to mount thereon the transfer target object; an electrostatic attracting device, including an internal electrode provided in the pick, configured to attract and hold the transfer target object on the pick electrostatically; and a control device configured to control the electrostatic attracting device and the driving device, wherein, by controlling the electrostatic attracting device and the driving device, the control device is configured to turn the internal electrode into an electrically floating state after the transfer target object is electrostatically attracted to and held on the pick, and configured to allow the transfer target object to be transferred by the transfer arm while maintaining a state in which the transfer target object is electrostatically attracted to and held on the pick.