STIFFNESS-FREQUENCY ADJUSTABLE XY MICROMOTION STAGE BASED ON STRESS STIFFENING

摘要

The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

主权项

1. A stiffness-frequency adjustable XY micromotion stage based on stress stiffening, comprising: an X-direction membrane set, a Y-direction membrane set, an X-direction motion sub-stage, a Y-direction motion sub-stage, an outer frame, an X-direction drive, a Y-direction drive, an X-direction displacement sensor, a Y-direction displacement sensor, a rack and a working table;
the outer frame being fixed to the rack; the elastic X-direction membrane set being arranged at two sides of the X-direction motion sub-stage, with one end thereof connected to an inner wall of the outer frame and an opposite end thereof connected to the X-direction motion sub-stage; the elastic Y-direction membrane set being arranged at two sides of the Y-direction motion sub-stage, with one end thereof connected to an inner wall of the X-direction motion sub-stage, and an opposite end thereof connected to the Y-direction motion sub-stage; the X-direction membrane set and the Y-direction membrane set being perpendicular to each other; and the working table being rigidly connected to the Y-direction motion sub-stage; membranes in each of the X-direction membrane set and the Y-direction membrane set being parallelly arranged, and having longitudinal directions perpendicular to feed directions of the X-direction motion sub-stage and of the Y-direction motion sub-stage, respectively; the X-direction drive comprising an X-direction drive stator and an X-direction drive mover; the Y-direction drive comprising a Y-direction drive stator and a Y-direction drive mover, the X-direction drive stator and the Y-direction drive stator being both fixed to the rack; the X-direction drive mover being fixed to the X-direction motion sub-stage, and the Y-direction drive mover being fixed to the Y-direction motion sub-stage; the outer frame having a groove formed at where it adjoins the X-direction membrane set so that an inner side of the outer frame forms a thin and deformable X-direction motion sub-stage spring member, wherein the outer frame has an X-direction frequency adjusting mechanism for adjusting deformation of the X-direction motion sub-stage spring member; and the Y-direction motion sub-stage having a deformable Y-direction motion sub-stage spring member at where it adjoins the Y-direction membrane set, wherein the Y-direction motion sub-stage has a Y-direction frequency adjusting mechanism for adjusting the Y-direction motion sub-stage spring member.