PHOTOELECTRIC CONVERSION ARRAY SUBSTRATE, MANUFACTURING METHOD THEREFOR AND PHOTOELECTRIC CONVERSION DEVICE

摘要

A photoelectric conversion array substrate, a manufacturing method therefor and a photoelectric conversion device. A photoelectric conversion array substrate comprises a thin film transistor formed on a base substrate (1) and a photodiode connected to the thin film transistor, wherein a photosensitive surface of the photodiode is a convex surface.